ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
High brightness, third-generation synchrotrons allow diffraction-limited performance and large flux for scanning photoemission microscopes. A new microscope, SuperMAXIMUM, is being developed at the University of Wisconsin Center for X ray Lithography in collaboration with the Sincrotrone Trieste. The beamline, being built in Trieste, uses a variable angle spherical grating monochromator (VASGM). A combination of rotation of a plane mirror and rotation of the spherical grating keeps the slit positions and beam directions fixed. The microscope objectives are normal-incidence, multilayer-coated Schwarzschild objectives. The project, which is nearing completion, utilizes novel designs for optics alignment, sample rastering mechanics, and software control. We will discuss the project status, new designs, and techniques. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1147500
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