ISSN:
0948-1907
Keywords:
Yttrium
;
Yttria
;
β-Diketonate compounds
;
CVD
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The preparation of [Y(tmhd)3 · H2O]2, Y(tmhd)3 and [Y(tmhd)3]2 (tmhd = 2,2,6,6-tetramethylheptane-3,5-dionate; tmod = 2,2,7-trimethyloctane-3,5-dionate) are described. These compounds have been characterized by 1H and 13C NMR, IR, UV/vis, TGA and GC/MS techniques. Crystal data include: [Y(tmhd)3 · H2O]2, Space Group P1, a = 11.6 Å, b = 14.6 Å, c = 14.9 Å, α = 60.5°, β = 63.1°, γ = 73.3°, V = 1937 Å3, z = 2, dc = 1.095, refcoll = 7165, refind = 7165, refsig = 4923, R = 7.0 %, Rw = 8.8 %; [Y(tmod)3]2, Space Group P21/n, a = 13.0 Å, b = 15.4 Å, c = 18.3 Å, β = 91.5°, V = 3670 Å3, z = 4, dc = 1.156, refcoll = 6642, refind = 6642, refsig = 2649, R = 10.6 %, Rw = 10.3 %. The vapor pressures of the compounds are discussed in the light of ligand symmetry concerns. Chemical vapor deposition experiments with these compounds produced films which were characterized by XRD, SEM, ESCA and surface profilometry. Film deposit composition and morphology are related to deposition ambient.
Additional Material:
12 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/cvde.19960020405
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