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  • Chemical Engineering  (4)
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  • 1
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 38 (1992), S. 1-14 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Adaptive control techniques, with their capability for providing satisfactory control even when the process changes with time, are promising candidates for dealing with common problems encountered in photolithography processing such as batch-to-batch variations in resist properties and inconsistencies in resist curing. In this article, an adaptive control strategy for the photolithography process is proposed and evaluated. The design utilizes a reduced-order lithography model, an on-line parameter estimator, and a nonlinear model-inversion controller.The width of the printed resist lines, a crucial output of photolithography, is controlled by automatically adjusting the exposure energy. In the calculation of the appropriate exposure adjustment, the controller uses both measured critical-dimensions as well as estimated values produced by the process model. The control system is capable of tracking changes in the photolithography process by automatic updating of key model parameters as the process evolves in time. Simulation studies of the closed-loop adaptive control strategy, using the PROLITH simulation package to represent the lithography process, demonstrate the feasibility of this approach.
    Additional Material: 16 Ill.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 36 (1990), S. 1391-1402 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: A control structure transformation is presented that includes the effects of inventory control system dynamics and internal flow dynamics on flows and compositions. This new transformation can be used to predict column dynamic operation for any alternative control structure from the open-loop model (inventory control only) obtained for a particular control structure (LV). New types of inverse responses are predicted using this technique and verified both by rigorous dynamic simulation and by experimental studies on a pilot-scale distillation column. These features also can be shown theoretically using a simplified transfer function model.
    Additional Material: 10 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 39 (1993), S. 344-354 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: On-line measurement of the important state variables in fermentations, particularly cell mass concentration, remains a difficult problem. However, a number of secondary or environmental variables can be measured conventionally and on-line, such as pH, and CO2 and O2 in the exhaust gas. Stephanopoulos and San (1984) have developed a modeling approach, based on species balances, that provides relations between the environmental and important state variables. Using such a model, the important state variables can be estimated in principle from more easily accessible on-line measurements.In this article, a new adaptive estimator is developed, incorporating as its basis an underlying nonlinear model so as to utilize the best possible a priori process knowledge. Base addition rate and CO2 offgas concentration are measured on-line and periodically. Cell mass measurements are incorporated infrequently and even at irregular sampling periods, thus providing a very flexible scheme. Only a single adapted parameter is required to match the model to the plant operating characteristics. This simple but rigorous model form results in an estimator that is easy to implement and to tune and which exhibits long-term robustness due to its multirate feedback structure. Experimental results from a laboratory-scale continuous fermentor show that such a cell mass estimation scheme yields excellent performance both open-loop (without control) and as a part of conventional and nonlinear adaptive control approaches.
    Additional Material: 11 Ill.
    Type of Medium: Electronic Resource
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  • 4
    Electronic Resource
    Electronic Resource
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 16 (1970), S. 733-738 
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Low temperature, phase-equilibria data for binary systems containing hydrogen, helium, and neon were used to develop a correlation relating deviations from the geometric mean combining rule for the characteristic energy parameter to the ionization potentials of the component species. With the exception of oxygen systems, this relatively simple relationship correctly predicts published deviations, determined by different methods, for a number of systems within expected uncertainties. It is shown that consideration of attractive forces only, as done by Hudson and McCoubrey, is inadequate for such predictions.
    Additional Material: 2 Ill.
    Type of Medium: Electronic Resource
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