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  • 1
    Electronic Resource
    Electronic Resource
    Rapid growth of ultra thin SiO2 films by a large-area electron beam (1989)
    Springer
    Applied physics 48 (1989), S. 567-571 
    Details
    ISSN: 1432-0630
    Keywords: 52.80-s ; 79.20Kz ; 81.60-j ; 68.55-b
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Rapid growth of ultra thin oxide films (40–180Å) of silicon using a low-energy large-area electron beam has been performed with a pressure ratio of 3∶1 (O2/He) and a total pressure of 0.5–0.7 Torr. A higher oxidation rate of about 625Å2/s is found for shorter irradiation time of the e-beam in the e-beam dose range 0.75–3 Coulomb/cm2 and at lower substrate temperature 540–740°C. AES and XPS demonstrated a rapid electron-stimulated oxidation process of the Si surface. For the grown ultra thin oxide films, C-V characteristics, dielectric strength, uniformity of the film over the entire Si wafer and its thickness as a function of the processing time of the e-beam are also presented.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00617858
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  • 2
    Electronic Resource
    Electronic Resource
    Highly efficient and accurate buffeting analysis of complex structures (1998)
    Chichester : Wiley-Blackwell
    Communications in Numerical Methods in Engineering 14 (1998), S. 559-567 
    Details
    ISSN: 1069-8299
    Keywords: gust ; buffet ; random ; vibration ; Engineering ; Numerical Methods and Modeling
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Mathematics , Technology
    Notes: A convenient and effective finite-element-based method for buffeting analysis of complex structures is presented. This method is very efficient for structures with the natural frequencies closely spaced because their corresponding modes and the cross-correlation terms between them should be included in the mode-superposition analysis. The imperfect correlation between gust excitations can also be dealt with conveniently. A numerical example is given which shows that by using this method the buffeting analysis of complex structures with thousands of degrees of freedom, dozens of imperfectly related excitations and a number of participating modes can be executed quite easily on an ordinary IBM/486 (or 586) personal computer. © 1998 John Wiley & Sons, Ltd.
    Additional Material: 1 Ill.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    Structural responses to non-uniformly modulated evolutionary random seismic excitations (1997)
    Chichester : Wiley-Blackwell
    Communications in Numerical Methods in Engineering 13 (1997), S. 605-616 
    Details
    ISSN: 1069-8299
    Keywords: structures ; response ; seismic ; random ; earthquake ; evolutionary ; Engineering ; Numerical Methods and Modeling
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Mathematics , Technology
    Notes: This paper presents an accurate algorithm for structural non-stationary random seismic responses. The ground acceleration is assumed to be an evolutionary random process, of which the modulation function is non-uniformly modulated, i.e. it depends on both time and frequency. The method is used to compute the non-stationary seismic responses of a non-uniform shear beam. The dependency of the power spectral densities of the excitations and of the responses on time and frequency is discussed, based on numerical results. ©1997 John Wiley & Sons, Ltd.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
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