Publication Date:
1998-05-01
Description:
As a basic layered structure for giant magnetoresistive (GMR) heads, NiFe/Cu/NiFe/Ta/Si substrate was measured by X-ray reflectometry at Cu Kα, Cu Kβ and Cu K-absorption-edge energies. The accuracy of both the Cu thickness and the interface width between the upper NiFe and the Cu layers was found to improve in the order Cu Kα 〈 Cu Kβ 〈 Cu K-edge. The final thickness and interface width values obtained from Cu Kβ reflectivity are in good agreement with those from the Cu K-edge. The anomalous-dispersion effect is useful in the more accurate analysis of the layered structure of transition metal multilayers because it causes a large difference in the refractive indices of specific elements near the absorption edge. The Kβ X-rays, which can be produced from conventional X-ray sources, are also available for the accurate analysis of reflectivity measurements.
Print ISSN:
0909-0495
Electronic ISSN:
1600-5775
Topics:
Geosciences
,
Physics
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