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Multipurpose high vacuum laser ablation/thin film deposition system (1999)

Gomlak, Geoff ; Kelly, Michael C. ; Panayotov, Valentin G. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 70 (1999), S. 3701-3706

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: An instrumental system is described that combines an apparatus for pulsed laser deposition (PLD) with a vacuum "suitcase" for transport of air-sensitive compounds. Laser ablation, plume diagnostics, and thin-film deposition are readily accomplished through a flexible design. The PLD apparatus consists of two cubes coupled via a bellows assembly and whose distance is easily changed pneumatically. For both the PLD apparatus and the vacuum suitcase, compact-design considerations have been implemented. Consequently, the footprint of the PLD apparatus is relatively small, and the vacuum suitcase can be transported easily between sites. © 1999 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1149980

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