ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
An apertured and cryoshrouded mass spectrometer, which measures line-of-sight molecular fluxes from the surface, has been incorporated into a GaAs molecular beam epitaxy system. The spectrometer is simple to implement, yet is a powerful real-time growth diagnostic. We have used the spectrometer to measure transient and steady-state As incorporation from As4 during bilayer-by-bilayer growth of GaAs. We find, interestingly, that (1) the incorporation coefficient does not oscillate significantly; (2) transient incorporation coefficients depend on surface reconstruction, and may be higher than 0.5 at high Ga fluxes; and (3) in the absence of a Ga flux, excess Ga on the surface need not imply an incorporation coefficient of 0.5.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.99916
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