ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Ballistic electron emission microscopy (BEEM) is a relatively new technique enabling spectroscopic investigation of subsurface interface structures and electronic properties. BEEM is a direct, nondamaging method with nanometer spatial resolution. In this paper, an inexpensive modification to a conventional scanning tunneling microscope, converting it to a BEEM, is presented. BEEM performance is significantly affected by the preamplifier and the low-pass filter, which is used to improve the signal-to-noise ratio. The system is tested on a thin Au metallization to (100) Si. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1145440
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