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  • 1
    Electronic Resource
    Electronic Resource
    Numerical analysis of higher-order geometric aberrations for a two-tube electrostatic lens (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 5946-5950 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Based on the electron optical canonical aberration theory, up to the fifth-order geometric aberrations have been analyzed for an equal diameter two-tube electrostatic lens with the gap of 0.1 diameter and accelerating voltage ratio ranging from 5 to 40. The precisions are controlled rigorously at every step. For the computational results presented the computed first- and third-order electron optical properties agree with the accurate values published in the literature of about 0.2%, and thus the fifth-order aberration is believed to be acquired in a precision of about 1%. The contributions of third- and fifth-order aberrations to the total aberration with respect to the filling factor or the accelerating voltage ratio have been first calculated numerically in the above-mentioned electrostatic lens. The method of accurate numerical differentiation of an analytical or a digital function up to the sixth order would be expected to make a contribution to the development of computational electron optics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.355206
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  • 2
    Electronic Resource
    Electronic Resource
    Aberration calculation for combined magnetic focusing deflection systems with curved axes (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 1570-1575 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The general aberration theory for combined electromagnetic focusing-deflection systems with curved axes will be applied to a scanning electron microscopic system and an electron lithographic system. All third order geometric and first order chromatic aberrations have been calculated along rectilinear/curvilinear axes. The important identities between some aberration coefficients will be verified numerically. The geometric and chromatic aberrations calculated along the matching curvilinear axis will be compared with those along the rectilinear axis. The computational trials may be of help for explaining the mechanism of moving/swinging objective lens and variable axis lens systems.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.353237
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  • 3
    Electronic Resource
    Electronic Resource
    Canonical aberration theory of multipoles: A critical reanalysis (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 71 (1992), S. 1588-1593 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Canonical aberration theory has been applied to analyze the aberration structure of both electrostatic and magnetic multipoles. It is shown rigorously that for 2N-pole magnetic multipoles with N=even, there is no axially symmetric aberration of any order, while for all the other cases of electromagnetic multipoles, there is always an axially symmetric aberration of the order of 2N−3. The method used is general in nature and can be applied to obtain detailed formulas of higher-order aberrations of multipoles and also to study their off-axis aberrations.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.351236
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  • 4
    Electronic Resource
    Electronic Resource
    Canonical aberration theory for calculating higher-order chromatic aberrations (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 69 (1991), S. 1962-1967 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Canonical aberration theory has been developed in previous papers by the author. In the present study, the canonical aberration theory has been used to deal with first- and third-order chromatic aberrations (including position and momentum aberrations at an arbitrary observation plane) for rotationally symmetrical optical systems. All first- and third-order chromatic aberrations have been expressed in canonical matrix representations, which are general in nature and appropriate for computer calculations.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.348768
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  • 5
    Electronic Resource
    Electronic Resource
    Canonical aberration theory in electron optics (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 5963-5967 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: By defining the Hamiltonian function in an electron optical system the canonical aberration theory has been developed in the up to fifth-order approximation. Therefore, the canonical position and momentum aberrations can be expressed by eikonal functions and equivalently by Poisson brackets. Consequently, all fifth-order canonical aberration coefficients for rotationally symmetrical electron optical systems have been derived at any arbitrary observation planes.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.346928
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  • 6
    Electronic Resource
    Electronic Resource
    Canonical aberration theory in electromagnetic multipoles (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 5968-5975 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In a 2N-pole electromagnetic system, defining the electron optical Hamiltonian function, we have derived both general algebraic expressions (arbitrary N) and special numerical formulas (N=3,4,5,6,7) for different aberrations from lower to higher order (i.e., the order of N−1, N+1, 2N−3, 2N−1, 3N−5). The so-called canonical aberration theory in electromagnetic multipoles has thus been developed, which allows us to deduce angular dependencies of different aberrations and to examine the possibility for spherical correction of a round lens by using multipoles.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.346929
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  • 7
    Electronic Resource
    Electronic Resource
    Numerical computation of higher-order chromatic aberrations for rotationally symmetric electrostatic lenses (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 28-32 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In the present paper third order chromatic aberrations have been computed for an immersion lens and an einzel lens based on canonical aberration theory. The electron trajectories with up to third order chromatic aberrations have been compared with the real trajectories. They are in good agreement, and the computational errors are believed to be about 0.2%. Therefore, the canonical theory of higher order chromatic aberration has been verified. As a practical application, for a typical electrostatic lens, the first, third order chromatic aberrations and the third order geometric aberrations, which are functions of the object side beam half-angle, have been presented in detail. It is expected that the results are useful for designing and optimizing a low chromatic aberration electrostatic lens.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.352133
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  • 8
    Electronic Resource
    Electronic Resource
    Three-dimensional boundary-element method for analyzing nonrotationally symmetric perturbations in electrostatic lenses (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 1643-1649 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The three-dimensional boundary-element method (3D BEM) has been discussed in some aspects involving the subdivision of boundary elements, the quadrature of surface charge density integrals, and their singularities. The 3D BEM has been applied to the analysis of nonrotationally symmetric perturbations in electrostatic lenses. The perturbations due to machining defects (including elliptical distortions, inclined end faces, misalignments, and their combinations) have been calculated and also the asymmetric aberrations have been computed. A set of computer programs has been developed. The computed perturbation potential distributions have been compared with the theoretical ones.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.345631
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  • 9
    Electronic Resource
    Electronic Resource
    Electron optical design of a high-resolution low-voltage scanning electron microscope with field emission gun (1993)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 64 (1993), S. 2905-2910 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: In the present study, a comprehensive description and a complete process for designing a high-resolution low-voltage scanning electron microscope with a field emission gun have been discussed, including the design of two types of magnetic immersion lenses optimized for low-voltage operation, the evaluation of their resolution, the design of the magnetic lens/secondary electron collector system, the calculation of three-dimensional trajectories for both secondary electrons and backscattered electrons, and the estimate of their collection efficiency. The computed results and the primary experiments indicate the possibility of achieving nanometer resolution, which basically approaches the electron optical predictable probe size for the low-voltage scanning electron microscope.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144381
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  • 10
    Electronic Resource
    Electronic Resource
    Discussions on the multiple-input maximum a-posteriori wave-function restoration method in high-resolution electron microscopy (1991)
    New York, NY : Wiley-Blackwell
    Journal of Electron Microscopy Technique 17 (1991), S. 344-350 
    Details
    ISSN: 0741-0581
    Keywords: Phase retrieval ; Nonlinear iterative method ; Multi-slice method ; Life and Medical Sciences ; Cell & Developmental Biology
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Natural Sciences in General
    Notes: The multiple-input maximum a-posteriori (MIMAP) wave-function restoration method in high-resolution electron microscopy proposed by Kirkland (1984) is further discussed. A modified MIMAP criterion that considers likely correlations between individual micrographs in a series of micrographs taken at different imaging conditions is presented. By performing wave-function restoration for a multislice method-simulated defocus series of MgO[110], the convergent properties of this modified MIMAP method are also described.
    Additional Material: 5 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/jemt.1060170308
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